Universal Journal of Mechanical Engineering Vol. 7(1), pp. 11 - 15
DOI: 10.13189/ujme.2019.070102
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Pull-in Effect for Micro Beam with Tensile Force

Skubov D. Yu. ^1,2,*, Privalova O. V. ², Shtukin L. V. ^1,2
1 Institute of Problem of Mechanical Engineering RAS & Saint-Petersburg, Russia
² Department of Mechanics and Processes of Control, Peter the Great St. Petersburg Polytechnic University, Russia

ABSTRACT

Recent time the development and achievement of micro- and nano-electromechanical systems (MEMS and NEMS) are appeal the great interest of physics, biologists, engineers-electricians. The designing of MEMS based on pull-in effect consists in interaction of electrostatic field with thin elastic conductive beam. This interaction leads to pull-in instability – the effect of collapse of two initially parallel conductive layers, which play the role of capacitor. The important significance of MEMS have been acquired [1, 2] such, for example, as micro-switches with forward or rotary movement. These devices may be membrane else cantilever or another type, also high speed rotational actuator – contactless micro-gyroscope.

KEYWORDS
Pull-in Effect, Electrostatic Field, Micro-beam

Cite This Paper in IEEE or APA Citation Styles
(a). IEEE Format:
[1] Skubov D. Yu. , Privalova O. V. , Shtukin L. V. , "Pull-in Effect for Micro Beam with Tensile Force," Universal Journal of Mechanical Engineering, Vol. 7, No. 1, pp. 11 - 15, 2019. DOI: 10.13189/ujme.2019.070102.

(b). APA Format:
Skubov D. Yu. , Privalova O. V. , Shtukin L. V. (2019). Pull-in Effect for Micro Beam with Tensile Force. Universal Journal of Mechanical Engineering, 7(1), 11 - 15. DOI: 10.13189/ujme.2019.070102.