Universal Journal of Mechanical Engineering Vol. 5(4), pp. 130 - 135
DOI: 10.13189/ujme.2017.050404
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A Study of Specific Down Force Energy and Cutting Depth of Sapphire Substrate Affected by Different Dipping Temperatures of Slurry

Zone-Ching Lin ^*, Hao-Yang Ding , Po-Yen Chen
Department of Mechanical Engineering, National Taiwan University of Science and Technology, Taiwan

ABSTRACT

This article studies the change of specific down force energy and cutting depth of sapphire substrate when sapphire substrates were dipped in different temperatures of slurry. It involved applying small down force in cutting sapphire substrates by atomic force microscope (AFM) before dipping them in slurry in order to obtain the SDFE value of without dipping slurry. Next, small down force was applied to cut sapphire substrates dipped in slurry for varying dipping temperatures to obtain the SDFE_reaction values of dipping slurry with different dipping temperatures. Nanocutting was performed by AFM with a small constant down force to obtain the cutting depths of sapphire substrate for the different dipping temperatures of slurry. The results of this study indicated that the dipping temperature of slurry increased, the SDFE_reaction value of sapphire substrate decreased and the cutting depth of sapphire substrate with a constant down force increased.

KEYWORDS
Specific Down Force Energy, Atomic Force Microscopy, Sapphire Substrate, Slurry Dipping Temperatures

Cite This Paper in IEEE or APA Citation Styles
(a). IEEE Format:
[1] Zone-Ching Lin , Hao-Yang Ding , Po-Yen Chen , "A Study of Specific Down Force Energy and Cutting Depth of Sapphire Substrate Affected by Different Dipping Temperatures of Slurry," Universal Journal of Mechanical Engineering, Vol. 5, No. 4, pp. 130 - 135, 2017. DOI: 10.13189/ujme.2017.050404.

(b). APA Format:
Zone-Ching Lin , Hao-Yang Ding , Po-Yen Chen (2017). A Study of Specific Down Force Energy and Cutting Depth of Sapphire Substrate Affected by Different Dipping Temperatures of Slurry. Universal Journal of Mechanical Engineering, 5(4), 130 - 135. DOI: 10.13189/ujme.2017.050404.