Universal Journal of Mechanical Engineering Vol. 7(1), pp. 11 - 15
DOI: 10.13189/ujme.2019.070102
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Pull-in Effect for Micro Beam with Tensile Force


Skubov D. Yu. 1,2,*, Privalova O. V. 2, Shtukin L. V. 1,2
1 Institute of Problem of Mechanical Engineering RAS & Saint-Petersburg, Russia
2 Department of Mechanics and Processes of Control, Peter the Great St. Petersburg Polytechnic University, Russia

ABSTRACT

Recent time the development and achievement of micro- and nano-electromechanical systems (MEMS and NEMS) are appeal the great interest of physics, biologists, engineers-electricians. The designing of MEMS based on pull-in effect consists in interaction of electrostatic field with thin elastic conductive beam. This interaction leads to pull-in instability – the effect of collapse of two initially parallel conductive layers, which play the role of capacitor. The important significance of MEMS have been acquired [1, 2] such, for example, as micro-switches with forward or rotary movement. These devices may be membrane else cantilever or another type, also high speed rotational actuator – contactless micro-gyroscope.

KEYWORDS
Pull-in Effect, Electrostatic Field, Micro-beam

Cite this paper
Skubov D. Yu. , Privalova O. V. , Shtukin L. V. . "Pull-in Effect for Micro Beam with Tensile Force." Universal Journal of Mechanical Engineering 7.1 (2019) 11 - 15. doi: 10.13189/ujme.2019.070102.